Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7911601 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2011-03-22 |
| 7903249 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Kaoru Sakai, Takafumi Okabe | 2011-03-08 |