Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8005292 | Method and apparatus for inspecting pattern defects | Shunji Maeda, Takafumi Okabe | 2011-08-23 |
| 7949178 | Pattern inspection method and its apparatus | Shunji Maeda, Takafumi Okabe | 2011-05-24 |
| 7903249 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Takafumi Okabe | 2011-03-08 |
| 7869966 | Inspection method and its apparatus, inspection system | Takafumi Okabe, Shunji Maeda | 2011-01-11 |