Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072597 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2011-12-06 |
| 8045148 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Hidetoshi Nishiyama, Tetsuya Watanabe, Takuaki Sekiguchi | 2011-10-25 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2011-10-18 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2011-09-06 |
| 7953567 | Defect inspection apparatus and defect inspection method | Kei Shimura, Masaaki Ito, Kenji Aiko, Shuichi Chikamatsu, Shigeo Otsuki +4 more | 2011-05-31 |
| 7952085 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2011-05-31 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7940383 | Method of detecting defects on an object | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2011-05-10 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2011-03-08 |