Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072597 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe +1 more | 2011-12-06 |
| 8035071 | Contamination-inspecting apparatus and detection circuit | Masami Makuuchi, Ritsurou Orihashi, Masayoshi Takahashi, Wen Li, Kengo Imagawa | 2011-10-11 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu +2 more | 2011-09-06 |
| 7990529 | Detection circuit and foreign matter inspection apparatus for semiconductor wafer | Masami Makuuchi, Ritsuro Orihashi | 2011-08-02 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno +5 more | 2011-05-31 |
| 7940383 | Method of detecting defects on an object | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2011-05-10 |
| 7925390 | Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space | Yusuke Miyazaki, Kazuhiro Zama | 2011-04-12 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Sachio Uto | 2011-03-08 |