Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999242 | Substrate holding apparatus, and inspection or processing apparatus | Kazuhiro Zama, Koichi Asami | 2011-08-16 |
| 7925390 | Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space | Takahiro Jingu, Kazuhiro Zama | 2011-04-12 |
| 7894052 | Optical defect inspection apparatus | Noriyuki Aizawa, Hiroyuki Kawakami, Kazuhiro Zama, Kazuo Takahashi, Shingo Tanaka | 2011-02-22 |