Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999242 | Substrate holding apparatus, and inspection or processing apparatus | Kazuhiro Zama, Yusuke Miyazaki | 2011-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999242 | Substrate holding apparatus, and inspection or processing apparatus | Kazuhiro Zama, Yusuke Miyazaki | 2011-08-16 |