Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2011-10-18 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Akira Hamamatsu, Takahiro Jingu +2 more | 2011-09-06 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Minori Noguchi, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7940383 | Method of detecting defects on an object | Minori Noguchi, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2011-05-10 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Takahiro Jingu, Sachio Uto | 2011-03-08 |