Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086422 | Method for analyzing defect data and inspection apparatus and review system | Yuji Takagi | 2011-12-27 |
| 8027527 | Method for analyzing defect data and inspection apparatus and review system | Yuji Takagi | 2011-09-27 |
| 7952699 | Apparatus of inspecting defect in semiconductor and method of the same | Akira Hamamatsu, Shunji Maeda | 2011-05-31 |
| 7940385 | Defect inspection apparatus and its method | Akira Hamamatsu, Shunji Maeda | 2011-05-10 |
| 7912276 | Method and apparatus for detecting pattern defects | Akira Hamamatsu, Yuji Takagi | 2011-03-22 |