Issued Patents 2005
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979642 | Method of self-annealing conductive lines that separates grain size effects from alloy mobility | Matthew S. Buynoski, Connie P. Wang, Minh Quoc Tran | 2005-12-27 |
| 6969678 | Multi-silicide in integrated circuit technology | Robert J. Chiu, Simon S. Chan, Jeffrey P. Patton, Austin Frenkel, Thorsten Kammler +1 more | 2005-11-29 |
| 6967160 | Method of manufacturing semiconductor device having nickel silicide with reduced interface roughness | Eric N. Paton, Simon S. Chan, Fred N. Hause | 2005-11-22 |
| 6951220 | Method of decontaminating equipment | Farzad Arasnia, Minh Van Ngo, Qi Xiang | 2005-10-04 |
| 6943569 | Method, system and apparatus to detect defects in semiconductor devices | Laura Pressley, David E. Brown, Travis R. Lewis, Edward E. Ehrichs | 2005-09-13 |
| 6927162 | Method of forming a contact in a semiconductor device with formation of silicide prior to plasma treatment | Wen Yu, Jinsong Yin, Connie P. Wang, Keizaburo Yoshie | 2005-08-09 |
| 6897144 | Cu capping layer deposition with improved integrated circuit reliability | Minh Van Ngo, Larry Zhao | 2005-05-24 |
| 6893910 | One step deposition method for high-k dielectric and metal gate electrode | Christy Mei-Chu Woo, Minh Van Ngo, James Pan, Jinsong Yin | 2005-05-17 |
| 6878592 | Selective epitaxy to improve silicidation | Minh Van Ngo, Qi Xiang, Eric N. Paton | 2005-04-12 |
| 6873051 | Nickel silicide with reduced interface roughness | Eric N. Paton, Simon S. Chan, Fred N. Hause | 2005-03-29 |
| 6867428 | Strained silicon NMOS having silicon source/drain extensions and method for its fabrication | Eric N. Paton, Qi Xiang | 2005-03-15 |
| 6861350 | Method of manufacturing semiconductor device comprising silicon-rich tasin metal gate electrode | Minh Van Ngo, Christy Mei-Chu Woo, Jinsong Yin, James Pan | 2005-03-01 |
| 6861349 | Method of forming an adhesion layer with an element reactive with a barrier layer | Sergey Lopatin, Matthew S. Buynoski, Pin-Chin Connie Wang | 2005-03-01 |
| 6858503 | Depletion to avoid cross contamination | Minh Van Ngo, Ming-Ren Lin, Qi Xiang, Eric N. Paton, Jung-Suk Goo | 2005-02-22 |