Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Vinita Singh, Srinivas D. Nemani, Yi Zheng, Lihua Li, Tzu-Fang Huang +1 more | 2004-11-09 |
| 6814087 | Accelerated plasma clean | Shankar Chandran, Scott A. Hendrickson, Gwendolyn D. Jones, Shankar Venkataraman | 2004-11-09 |
| 6806207 | Method of depositing low K films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Wai-Fan Yau, David Cheung +5 more | 2004-10-19 |
| 6784119 | Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition | Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Wai-Fan Yau, Shin-Puu Jeng +2 more | 2004-08-31 |
| 6764958 | Method of depositing dielectric films | Srinivas D. Nemani, Li-Qun Xia, Dian Sugiarto, Ping Xu, Francimar Campana-Schmitt +1 more | 2004-07-20 |
| 6753258 | Integration scheme for dual damascene structure | Frederic Gaillard, Li-Qun Xia, Paul Fisher, Margaret Gotuaco | 2004-06-22 |
| 6750141 | Silicon carbide cap layers for low dielectric constant silicon oxide layers | Li-Qun Xia, Paul Fisher, Margaret Gotuaco, Frederic Gaillard | 2004-06-15 |
| 6709721 | Purge heater design and process development for the improvement of low k film properties | Juan Carlos Rocha-Alvarez, Chen-An Chen, Shankar Venkataraman | 2004-03-23 |
| 6680164 | Solvent free photoresist strip and residue removal processing for post etching of low-k films | Huong Nguyen, Mark Kawaguchi, Mehul Naik, Li-Qun Xia | 2004-01-20 |