Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824081 | Needle controlled fuel injector with two control valves | Lester L. Peters, C. Edward Morris, David M. Rix | 2004-11-30 |
| 6814087 | Accelerated plasma clean | Shankar Chandran, Scott A. Hendrickson, Gwendolyn D. Jones, Ellie Yieh | 2004-11-09 |
| 6797643 | Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power | Juan Carlos Rocha-Alvarez, Maosheng Zhao, Ying Yu, Srinivas D. Nemani, Li-Qun Xia | 2004-09-28 |
| 6709721 | Purge heater design and process development for the improvement of low k film properties | Juan Carlos Rocha-Alvarez, Chen-An Chen, Ellie Yieh | 2004-03-23 |