Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Vinita Singh, Yi Zheng, Lihua Li, Tzu-Fang Huang, Li-Qun Xia +1 more | 2004-11-09 |
| 6797643 | Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power | Juan Carlos Rocha-Alvarez, Maosheng Zhao, Ying Yu, Shankar Venkataraman, Li-Qun Xia | 2004-09-28 |
| 6764958 | Method of depositing dielectric films | Li-Qun Xia, Dian Sugiarto, Ellie Yieh, Ping Xu, Francimar Campana-Schmitt +1 more | 2004-07-20 |