Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Vinita Singh, Srinivas D. Nemani, Yi Zheng, Tzu-Fang Huang, Li-Qun Xia +1 more | 2004-11-09 |
| 6790788 | Method of improving stability in low k barrier layers | Tzu-Fang Huang, Li-Qun Xia | 2004-09-14 |