Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Srinivas D. Nemani, Yi Zheng, Lihua Li, Tzu-Fang Huang, Li-Qun Xia +1 more | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Srinivas D. Nemani, Yi Zheng, Lihua Li, Tzu-Fang Huang, Li-Qun Xia +1 more | 2004-11-09 |