Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815373 | Use of cyclic siloxanes for hardness improvement of low k dielectric films | Vinita Singh, Srinivas D. Nemani, Yi Zheng, Lihua Li, Li-Qun Xia +1 more | 2004-11-09 |
| 6806207 | Method of depositing low K films | Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau, David Cheung +5 more | 2004-10-19 |
| 6790788 | Method of improving stability in low k barrier layers | Lihua Li, Li-Qun Xia | 2004-09-14 |
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Li-Qun Xia, Ping Xu, Louis Yang, Wen Zhu | 2004-03-02 |