Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759327 | Method of depositing low k barrier layers | Li-Qun Xia, Ping Xu | 2004-07-06 |
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Li-Qun Xia, Ping Xu, Tzu-Fang Huang, Wen Zhu | 2004-03-02 |