Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Li-Qun Xia, Ping Xu, Louis Yang, Tzu-Fang Huang | 2004-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699784 | Method for depositing a low k dielectric film (K>3.5) for hard mask application | Li-Qun Xia, Ping Xu, Louis Yang, Tzu-Fang Huang | 2004-03-02 |