Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797643 | Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power | Maosheng Zhao, Ying Yu, Shankar Venkataraman, Srinivas D. Nemani, Li-Qun Xia | 2004-09-28 |
| 6709721 | Purge heater design and process development for the improvement of low k film properties | Chen-An Chen, Ellie Yieh, Shankar Venkataraman | 2004-03-23 |