Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825562 | Damascene structure fabricated using a layer of silicon-based photoresist material | Tim Weidman, Dian Sugiarto, Allen Zhao | 2004-11-30 |
| 6680164 | Solvent free photoresist strip and residue removal processing for post etching of low-k films | Huong Nguyen, Mark Kawaguchi, Li-Qun Xia, Ellie Yieh | 2004-01-20 |