Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498061 | Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation | Rama Divakaruni, Stephan Kudelka, Helmut Tews, Irene McStay, Kil-Ho Lee | 2002-12-24 |
| 6486024 | Integrated circuit trench device with a dielectric collar stack, and method of forming thereof | Helmut Tews, Alexander Michaelis, Stephan Kudelka, Ulrike Gruening | 2002-11-26 |
| 6451662 | Method of forming low-leakage on-chip capacitor | Michael P. Chudzik, Oleg Gluschenkov, Raj Jammy, Helmut Tews | 2002-09-17 |
| 6426253 | Method of forming a vertically oriented device in an integrated circuit | Helmut Tews, Alexander Michaelis, Brian Lee, Stephan Kudelka | 2002-07-30 |
| 6403423 | Modified gate processing for optimized definition of array and logic devices on same chip | Mary E. Weybright, Gary B. Bronner, Richard A. Conti, Ramachandra Divakaruni, Jeffrey P. Gambino +1 more | 2002-06-11 |
| 6399490 | Highly conformal titanium nitride deposition process for high aspect ratio structures | Rajarao Jammy, Cheryl G. Faltermeier, Kwong Hon Wong | 2002-06-04 |
| 6379869 | Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning | Gerhard Kunkel, Alois Gutmann, Bruno Spuler | 2002-04-30 |
| 6355503 | Method for producing square contact holes utilizing side lobe formation | — | 2002-03-12 |
| 6335247 | Integrated circuit vertical trench device and method of forming thereof | Helmut Tews, Alexander Michaelis, Stephan Kudelka, Brian Lee | 2002-01-01 |