Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498061 | Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation | Rama Divakaruni, Helmut Tews, Irene McStay, Kil-Ho Lee, Uwe Schroeder | 2002-12-24 |
| 6486024 | Integrated circuit trench device with a dielectric collar stack, and method of forming thereof | Helmut Tews, Alexander Michaelis, Uwe Schroeder, Ulrike Gruening | 2002-11-26 |
| 6458647 | Process flow for sacrificial collar with poly mask | Helmut Tews, Irene McStay | 2002-10-01 |
| 6440872 | Method for hybrid DRAM cell utilizing confined strap isolation | Jack A. Mandelman, Ramachandra Divakaruni, Carl Radens | 2002-08-27 |
| 6437401 | Structure and method for improved isolation in trench storage cells | Jack A. Mandelman, Andreas Knorr, Stephen Rahn, Helmut Tews, Michael Wise | 2002-08-20 |
| 6426253 | Method of forming a vertically oriented device in an integrated circuit | Helmut Tews, Alexander Michaelis, Brian Lee, Uwe Schroeder | 2002-07-30 |
| 6406970 | Buried strap formation without TTO deposition | Helmut Tews | 2002-06-18 |
| 6352893 | Low temperature self-aligned collar formation | Alexander Michaelis, Jochen Beintner, Oliver Genz | 2002-03-05 |
| 6335247 | Integrated circuit vertical trench device and method of forming thereof | Helmut Tews, Alexander Michaelis, Uwe Schroeder, Brian Lee | 2002-01-01 |