Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498061 | Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation | Rama Divakaruni, Stephan Kudelka, Helmut Tews, Irene McStay, Uwe Schroeder | 2002-12-24 |