Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498061 | Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation | Rama Divakaruni, Stephan Kudelka, Helmut Tews, Kil-Ho Lee, Uwe Schroeder | 2002-12-24 |
| 6458647 | Process flow for sacrificial collar with poly mask | Helmut Tews, Stephan Kudelka | 2002-10-01 |
| 6444516 | Semi-insulating diffusion barrier for low-resistivity gate conductors | Lawrence A. Clevenger, Jack A. Mandelman, Rajarao Jammy, Oleg Gluschenkov, Kwong Hon Wong +1 more | 2002-09-03 |