Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444516 | Semi-insulating diffusion barrier for low-resistivity gate conductors | Lawrence A. Clevenger, Jack A. Mandelman, Rajarao Jammy, Oleg Gluschenkov, Irene McStay +1 more | 2002-09-03 |
| 6436760 | Method for reducing surface oxide in polysilicon processing | Ashima B. Chakravarti, Satya N. Chakravarti, Subramanian S. Iyer | 2002-08-20 |
| 6432725 | Methods for crystallizing metallic oxide dielectric films at low temperature | Jingyu Lian, Katherine L. Saenger, Chenting Lin | 2002-08-13 |
| 6417567 | Flat interface for a metal-silicon contract barrier film | Anthony G. Domenicucci, Lynne M. Gignac, Yun-Yu Wang, Horatio S. Wildman, Roy A. Carruthers +2 more | 2002-07-09 |
| 6399490 | Highly conformal titanium nitride deposition process for high aspect ratio structures | Rajarao Jammy, Cheryl G. Faltermeier, Uwe Schroeder | 2002-06-04 |
| 6388327 | Capping layer for improved silicide formation in narrow semiconductor structures | Kenneth J. Giewont, Stephen Bruce Brodsky, Cyril Cabral, Jr., Anthony G. Domenicucci, Craig Ransom +2 more | 2002-05-14 |
| 6387790 | Conversion of amorphous layer produced during IMP Ti deposition | Anthony G. Domenicucci, Chung-Ping Eng, William J. Murphy, Tina Wagner, Yun-Yu Wang | 2002-05-14 |
| 6383929 | Copper vias in low-k technology | Steven H. Boettcher, Herbert L. Ho, Mark Hoinkis, Hyun Koo Lee, Yun-Yu Wang | 2002-05-07 |