Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495429 | Controlling internal thermal oxidation and eliminating deep divots in SIMOX by chlorine-based annealing | Michael E. Adamcek, Stephen Fox, Neena Garg, Kenneth J. Giewont, Thomas R. Kupiec +2 more | 2002-12-17 |
| 6475893 | Method for improved fabrication of salicide structures | Kenneth J. Giewont, Yun-Yu Wang, Russell H. Arndt, Craig Ransom, Judith Coffin +2 more | 2002-11-05 |
| 6417567 | Flat interface for a metal-silicon contract barrier film | Lynne M. Gignac, Yun-Yu Wang, Horatio S. Wildman, Kwong Hon Wong, Roy A. Carruthers +2 more | 2002-07-09 |
| 6387790 | Conversion of amorphous layer produced during IMP Ti deposition | Chung-Ping Eng, William J. Murphy, Tina Wagner, Yun-Yu Wang, Kwong Hon Wong | 2002-05-14 |
| 6388327 | Capping layer for improved silicide formation in narrow semiconductor structures | Kenneth J. Giewont, Stephen Bruce Brodsky, Cyril Cabral, Jr., Craig Ransom, Yun-Yu Wang +2 more | 2002-05-14 |
| 6335262 | Method for fabricating different gate oxide thicknesses within the same chip | Scott W. Crowder, Liang Han, Michael Hargrove, Paul A. Ronsheim | 2002-01-01 |