Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475893 | Method for improved fabrication of salicide structures | Kenneth J. Giewont, Russell H. Arndt, Craig Ransom, Judith Coffin, Anthony G. Domenicucci +2 more | 2002-11-05 |
| 6440851 | Method and structure for controlling the interface roughness of cobalt disilicide | Paul D. Agnello, Cyril Cabral, Jr., Roy A. Carruthers, James M. E. Harper, Christian Lavoie +4 more | 2002-08-27 |
| 6436823 | Method for forming a TiN layer on top of a metal silicide layer in a semiconductor structure and structure formed | Cyril Cabral, Jr., Chung-Ping Eng, Lynne M. Gignac, Christian Lavoie, Patricia A. O'Neil +3 more | 2002-08-20 |
| 6417567 | Flat interface for a metal-silicon contract barrier film | Anthony G. Domenicucci, Lynne M. Gignac, Horatio S. Wildman, Kwong Hon Wong, Roy A. Carruthers +2 more | 2002-07-09 |
| 6388327 | Capping layer for improved silicide formation in narrow semiconductor structures | Kenneth J. Giewont, Stephen Bruce Brodsky, Cyril Cabral, Jr., Anthony G. Domenicucci, Craig Ransom +2 more | 2002-05-14 |
| 6387790 | Conversion of amorphous layer produced during IMP Ti deposition | Anthony G. Domenicucci, Chung-Ping Eng, William J. Murphy, Tina Wagner, Kwong Hon Wong | 2002-05-14 |
| 6383929 | Copper vias in low-k technology | Steven H. Boettcher, Herbert L. Ho, Mark Hoinkis, Hyun Koo Lee, Kwong Hon Wong | 2002-05-07 |
| 6380628 | Microstructure liner having improved adhesion | John A. Miller, Andrew H. Simon, Jill Slattery, Cyprian Emeka Uzoh | 2002-04-30 |
| 6339007 | Capacitor stack structure and method of fabricating description | Rajarao Jammy, Lee J. Kimball, David E. Kotecki, Jenny Lian, Chenting Lin +4 more | 2002-01-15 |