Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436823 | Method for forming a TiN layer on top of a metal silicide layer in a semiconductor structure and structure formed | Cyril Cabral, Jr., Chung-Ping Eng, Lynne M. Gignac, Christian Lavoie, Patricia A. O'Neil +3 more | 2002-08-20 |
| 6387790 | Conversion of amorphous layer produced during IMP Ti deposition | Anthony G. Domenicucci, Chung-Ping Eng, William J. Murphy, Yun-Yu Wang, Kwong Hon Wong | 2002-05-14 |
| 6345399 | Hard mask process to prevent surface roughness for selective dielectric etching | Paul C. Jamison, Richard S. Wise, Hongwen Yan | 2002-02-12 |