Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500772 | Methods and materials for depositing films on semiconductor substrates | Ashima B. Chakravarti, Richard A. Conti, Chester T. Dziobkowski, Thomas Ivers, Frank V. Liucci | 2002-12-31 |
| 6355567 | Retrograde openings in thin films | Scott D. Halle, David E. Kotecki, Richard S. Wise | 2002-03-12 |
| 6348419 | Modification of the wet characteristics of deposited layers and in-line control | Frank Grellner, Glen L. Miles, David C. Mosher, Emmanuel Batt | 2002-02-19 |
| 6345399 | Hard mask process to prevent surface roughness for selective dielectric etching | Tina Wagner, Richard S. Wise, Hongwen Yan | 2002-02-12 |