Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6345399 | Hard mask process to prevent surface roughness for selective dielectric etching | Paul C. Jamison, Tina Wagner, Richard S. Wise | 2002-02-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6345399 | Hard mask process to prevent surface roughness for selective dielectric etching | Paul C. Jamison, Tina Wagner, Richard S. Wise | 2002-02-12 |