Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461529 | Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme | Diane C. Boyd, Stuart M. Burns, Hussein I. Hanafi, Waldemar Walter Kocon, William C. Wille | 2002-10-08 |
| 6355567 | Retrograde openings in thin films | Scott D. Halle, Paul C. Jamison, David E. Kotecki | 2002-03-12 |
| 6345399 | Hard mask process to prevent surface roughness for selective dielectric etching | Paul C. Jamison, Tina Wagner, Hongwen Yan | 2002-02-12 |
| 6342722 | Integrated circuit having air gaps between dielectric and conducting lines | Michael D. Armacost, Peter D. Hoh, David V. Horak | 2002-01-29 |