Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461529 | Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme | Diane C. Boyd, Hussein I. Hanafi, Waldemar Walter Kocon, William C. Wille, Richard S. Wise | 2002-10-08 |