Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461529 | Anisotropic nitride etch process with high selectivity to oxide and photoresist layers in a damascene etch scheme | Diane C. Boyd, Stuart M. Burns, Hussein I. Hanafi, William C. Wille, Richard S. Wise | 2002-10-08 |
| 6375859 | Process for resist clean up of metal structures on polyimide | Richard P. Volant, Joseph T. Kocis, Seshadri Subbanna | 2002-04-23 |