Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500772 | Methods and materials for depositing films on semiconductor substrates | Ashima B. Chakravarti, Chester T. Dziobkowski, Thomas Ivers, Paul C. Jamison, Frank V. Liucci | 2002-12-31 |
| 6486015 | Low temperature carbon rich oxy-nitride for improved RIE selectivity | Nirmal Chaudhary | 2002-11-26 |
| 6429149 | Low temperature LPCVD PSG/BPSG process | Ashima B. Chakravarti, Laertis Economikos, Byeongju Park | 2002-08-06 |
| 6403423 | Modified gate processing for optimized definition of array and logic devices on same chip | Mary E. Weybright, Gary B. Bronner, Ramachandra Divakaruni, Jeffrey P. Gambino, Peter D. Hoh +1 more | 2002-06-11 |
| 6335261 | Directional CVD process with optimized etchback | Wesley C. Natzle, Laertis Economikos, Thomas Ivers, George D. Papasouliotis | 2002-01-01 |