Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486015 | Low temperature carbon rich oxy-nitride for improved RIE selectivity | Richard A. Conti | 2002-11-26 |
| 6365328 | Semiconductor structure and manufacturing method | Hua Shen, David E. Kotecki, Satish D. Athavale, Jenny Lian, Laertis Economikos +2 more | 2002-04-02 |