Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420099 | Tungsten hard mask for dry etching aluminum-containing layers | Martin Gutsche | 2002-07-16 |
| 6420272 | Method for removal of hard mask used to define noble metal electrode | Hua Shen, David E. Kotecki, Jenny Lian, Gerhard Kunkel, Nimal Chaudhary | 2002-07-16 |
| 6406925 | Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing | Leslie G. Jerde, John A. Meyer | 2002-06-18 |
| 6365328 | Semiconductor structure and manufacturing method | Hua Shen, David E. Kotecki, Jenny Lian, Laertis Economikos, Fen F. Jamin +2 more | 2002-04-02 |
| 6348374 | Process for 4F2 STC cell having vertical MOSFET and buried-bitline conductor structure | Gary B. Bronner, Ramachandra Divakaruni, Ulrike Gruening, Jack A. Mandelman, Carl Radens | 2002-02-19 |
| 6346428 | Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing | Leslie G. Jerde, John A. Meyer | 2002-02-12 |