Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406925 | Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing | Satish D. Athavale, Leslie G. Jerde | 2002-06-18 |
| 6346428 | Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing | Satish D. Athavale, Leslie G. Jerde | 2002-02-12 |