Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500314 | Plasma etch reactor and method | Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2002-12-31 |
| 6486069 | Cobalt silicide etch process and apparatus | Steven Marks, Stephen P. DeOrnellas | 2002-11-26 |
| 6406925 | Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing | Satish D. Athavale, John A. Meyer | 2002-06-18 |
| 6391148 | Cobalt silicide etch process and apparatus | Steven Marks, Stephen P. DeOrnellas | 2002-05-21 |
| 6354240 | Plasma etch reactor having a plurality of magnets | Stephen P. DeOrnellas, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2002-03-12 |
| 6346428 | Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing | Satish D. Athavale, John A. Meyer | 2002-02-12 |