Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500314 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Robert C. Vail, Kurt A. Olson | 2002-12-31 |
| 6492280 | Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls | Stephen P. DeOrnellas, Paritosh Rajora | 2002-12-10 |
| 6410448 | Plasma etch reactor and method for emerging films | Stephen P. DeOrnellas, Robert C. Vail | 2002-06-25 |
| 6354240 | Plasma etch reactor having a plurality of magnets | Stephen P. DeOrnellas, Leslie G. Jerde, Robert C. Vail, Kurt A. Olson | 2002-03-12 |