Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500314 | Plasma etch reactor and method | Leslie G. Jerde, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2002-12-31 |
| 6492280 | Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls | Alferd Cofer, Paritosh Rajora | 2002-12-10 |
| 6486069 | Cobalt silicide etch process and apparatus | Steven Marks, Leslie G. Jerde | 2002-11-26 |
| 6410448 | Plasma etch reactor and method for emerging films | Alferd Cofer, Robert C. Vail | 2002-06-25 |
| 6391148 | Cobalt silicide etch process and apparatus | Steven Marks, Leslie G. Jerde | 2002-05-21 |
| 6360686 | Plasma reactor with a deposition shield | Robert Ditizio | 2002-03-26 |
| 6354240 | Plasma etch reactor having a plurality of magnets | Leslie G. Jerde, Alferd Cofer, Robert C. Vail, Kurt A. Olson | 2002-03-12 |