Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492280 | Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls | Stephen P. DeOrnellas, Alferd Cofer | 2002-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492280 | Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls | Stephen P. DeOrnellas, Alferd Cofer | 2002-12-10 |