Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500314 | Plasma etch reactor and method | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson | 2002-12-31 |
| 6410448 | Plasma etch reactor and method for emerging films | Stephen P. DeOrnellas, Alferd Cofer | 2002-06-25 |
| 6354240 | Plasma etch reactor having a plurality of magnets | Stephen P. DeOrnellas, Leslie G. Jerde, Alferd Cofer, Kurt A. Olson | 2002-03-12 |