Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498383 | Oxynitride shallow trench isolation and method of formation | Klaus D. Beyer, Patrick R. Varekamp | 2002-12-24 |
| 6368969 | Chemical-mechanical polishing methods | Laertis Economikos | 2002-04-09 |
| 6365328 | Semiconductor structure and manufacturing method | Hua Shen, David E. Kotecki, Satish D. Athavale, Jenny Lian, Laertis Economikos +2 more | 2002-04-02 |
| 6344414 | Chemical-mechanical polishing system having a bi-material wafer backing film assembly | Kenneth M. Davis, Bradley P. Jones, Michael F. Lofaro | 2002-02-05 |