Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478665 | Multi-wafer polishing tool | — | 2002-11-12 |
| 6475072 | Method of wafer smoothing for bonding using chemo-mechanical polishing (CMP) | Donald F. Canaperi, Jack O. Chu, Guy M. Cohen, Lijuan Huang, John A. Ott | 2002-11-05 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, William J. Cote, Paul M. Feeney, Mahadevaiyer Krishnan, Joyce C. Liu +2 more | 2002-02-19 |
| 6344414 | Chemical-mechanical polishing system having a bi-material wafer backing film assembly | Kenneth M. Davis, Fen F. Jamin, Bradley P. Jones | 2002-02-05 |