Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483172 | Semiconductor device structure with hydrogen-rich layer for facilitating passivation of surface states | Donna R. Cote, Son V. Nguyen, Markus Kirchhoff, Max G. Levy, Manfred Hauf | 2002-11-19 |
| 6375693 | Chemical-mechanical planarization of barriers or liners for copper metallurgy | Daniel C. Edelstein, Naftali E. Lustig | 2002-04-23 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, Paul M. Feeney, Mahadevaiyer Krishnan, Joyce C. Liu, Michael F. Lofaro +2 more | 2002-02-19 |