Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479884 | Interim oxidation of silsesquioxane dielectric for dual damascene process | Robert Cook, Stephen E. Greco, John P. Hummel, Vincent J. McGahay, Rebecca D. Mih +1 more | 2002-11-12 |
| 6429067 | Dual mask process for semiconductor devices | James C. Brighten, Jeffrey J. Brown, John W. Golz, George A. Kaplita, Rebecca D. Mih +4 more | 2002-08-06 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, William J. Cote, Paul M. Feeney, Mahadevaiyer Krishnan, Michael F. Lofaro +2 more | 2002-02-19 |
| 6348736 | In situ formation of protective layer on silsesquioxane dielectric for dual damascene process | Vincent J. McGahay, John P. Hummel, Rebecca D. Mih, Kamalesh K. Srivastava, Robert Cook +1 more | 2002-02-19 |