Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479884 | Interim oxidation of silsesquioxane dielectric for dual damascene process | Robert Cook, Stephen E. Greco, John P. Hummel, Joyce C. Liu, Vincent J. McGahay +1 more | 2002-11-12 |
| 6448629 | Semiconductor device and method of making same | Kevin S. Petrarca | 2002-09-10 |
| 6429067 | Dual mask process for semiconductor devices | Joyce C. Liu, James C. Brighten, Jeffrey J. Brown, John W. Golz, George A. Kaplita +4 more | 2002-08-06 |
| 6429522 | Microprocessor having air as a dielectric and encapsulated lines | Kevin S. Petrarca | 2002-08-06 |
| 6407396 | Wafer metrology structure | Eric P. Solecky, Donald C. Wheeler | 2002-06-18 |
| 6391703 | Buried strap for DRAM using junction isolation technique | Nivo Rovedo, Chung H. Lam | 2002-05-21 |
| 6348736 | In situ formation of protective layer on silsesquioxane dielectric for dual damascene process | Vincent J. McGahay, John P. Hummel, Joyce C. Liu, Kamalesh K. Srivastava, Robert Cook +1 more | 2002-02-19 |