Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479884 | Interim oxidation of silsesquioxane dielectric for dual damascene process | Robert Cook, Stephen E. Greco, Joyce C. Liu, Vincent J. McGahay, Rebecca D. Mih +1 more | 2002-11-12 |
| 6448176 | Dual damascene processing for semiconductor chip interconnects | Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel, Katherine L. Saenger | 2002-09-10 |
| 6423566 | Moisture and ion barrier for protection of devices and interconnect structures | Claudius Feger | 2002-07-23 |
| 6348736 | In situ formation of protective layer on silsesquioxane dielectric for dual damascene process | Vincent J. McGahay, Joyce C. Liu, Rebecca D. Mih, Kamalesh K. Srivastava, Robert Cook +1 more | 2002-02-19 |