Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497963 | Hydrogenated oxidized silicon carbon material | Alfred Grill, Vishnubhai V. Patel, Laurent Perraud | 2002-12-24 |
| 6489857 | Multiposition micro electromechanical switch | Kevin S. Petrarca, Robert A. Groves, Brian Herbst, Richard P. Volant | 2002-12-03 |
| 6486557 | Hybrid dielectric structure for improving the stiffness of back end of the line structures | Charles R. Davis, Daniel C. Edelstein, John C. Hay, Jr., Jeffrey Hedrick, Vincent J. McGahay +1 more | 2002-11-26 |
| 6448176 | Dual damascene processing for semiconductor chip interconnects | Alfred Grill, John P. Hummel, Vishnubhai V. Patel, Katherine L. Saenger | 2002-09-10 |
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Vishnubhai V. Patel +2 more | 2002-09-10 |
| 6428894 | Tunable and removable plasma deposited antireflective coatings | Katherina Babich, Alessandro C. Callegari, Julien Fontaine, Alfred Grill, Vishnubhai V. Patel | 2002-08-06 |
| 6413852 | Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material | Alfred Grill, Jeffrey Hedrick, Satyanarayana V. Nitta, Kevin S. Petrarca, Sampath Purushothaman +2 more | 2002-07-02 |
| 6380003 | Damascene anti-fuse with slot via | Chandrasekhar Narayan, Carl Radens | 2002-04-30 |
| 6346484 | Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Satyanarayana V. Nitta, Katherine L. Saenger +1 more | 2002-02-12 |
| 6346747 | Method for fabricating a thermally stable diamond-like carbon film as an intralevel or interlevel dielectric in a semiconductor device and device made | Alfred Grill, Vishnubhai V. Patel | 2002-02-12 |