Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes +2 more | 2002-09-10 |
| 6448176 | Dual damascene processing for semiconductor chip interconnects | Alfred Grill, John P. Hummel, Christopher V. Jahnes, Vishnubhai V. Patel | 2002-09-10 |
| 6432725 | Methods for crystallizing metallic oxide dielectric films at low temperature | Jingyu Lian, Kwong Hon Wong, Chenting Lin | 2002-08-13 |
| 6413852 | Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material | Alfred Grill, Jeffrey Hedrick, Christopher V. Jahnes, Satyanarayana V. Nitta, Kevin S. Petrarca +2 more | 2002-07-02 |
| 6391773 | Method and materials for through-mask electroplating and selective base removal | Panayotis Andricacos, Cyril Cabral, Jr., Roy A. Carruthers, Alfred Grill | 2002-05-21 |
| 6388285 | Feram cell with internal oxygen source and method of oxygen release | Charles T. Black, Cyril Cabral, Jr., Alfred Grill, Deborah A. Neumayer, Wilbur D. Pricer +1 more | 2002-05-14 |
| 6346484 | Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures | John M. Cotte, Christopher V. Jahnes, Kenneth McCullough, Wayne M. Moreau, Satyanarayana V. Nitta +1 more | 2002-02-12 |