Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468413 | Electrochemical etch for high tin solder bumps | Lisa A. Fanti, David E. Eichstadt | 2002-10-22 |
| 6457480 | Process and apparatus for cleaning filters | Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons, Charles J. Taft | 2002-10-01 |
| 6454869 | Process of cleaning semiconductor processing, handling and manufacturing equipment | Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-09-24 |
| 6451375 | Process for depositing a film on a nanometer structure | Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft | 2002-09-17 |
| 6429523 | Method for forming interconnects on semiconductor substrates and structures formed | Panayotis Andricacos, Cyril Cabral, Jr., Lynne M. Gignac, Wilma Jean Horkans, Kenneth P. Rodbell | 2002-08-06 |
| 6425956 | Process for removing chemical mechanical polishing residual slurry | Donald J. Delehanty, Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft +1 more | 2002-07-30 |
| 6398875 | Process of drying semiconductor wafers using liquid or supercritical carbon dioxide | Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-06-04 |
| 6346484 | Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures | Christopher V. Jahnes, Kenneth McCullough, Wayne M. Moreau, Satyanarayana V. Nitta, Katherine L. Saenger +1 more | 2002-02-12 |